US 12,444,569 B2
Endpointing with determination of remaining distance
Zoltán Orémuš, Brno (CZ); Lukáš Hübner, Jiříkovice (CZ); Jaroslav Stárek, Olomouc (CZ); and Tomáš Onderlička, Brno (CZ)
Assigned to FEI Company, Hillsboro, OR (US)
Filed by FEI Company, Hillsboro, OR (US)
Filed on Dec. 19, 2022, as Appl. No. 18/084,412.
Claims priority of provisional application 63/322,577, filed on Mar. 22, 2022.
Prior Publication US 2023/0307209 A1, Sep. 28, 2023
Int. Cl. H01J 37/305 (2006.01); H01J 37/28 (2006.01)
CPC H01J 37/3056 (2013.01) [H01J 37/28 (2013.01); H01J 2237/2802 (2013.01); H01J 2237/30466 (2013.01); H01J 2237/31745 (2013.01)] 27 Claims
OG exemplary drawing
 
1. An apparatus comprising:
an imager configured to generate an image of a cut face of a sample; and
a controller configured to:
acquire the image of the cut face from the imager;
compare the image to one or more references;
based on the comparing, determine a distance value between the cut face and a target position; and
store the distance value.