US 12,444,568 B2
Sample holder of transmission electron microscope and semiconductor device inspection method using the sample holder
Yeoseon Choi, Suwon-si (KR); and Donghoon Kwon, Suwon-si (KR)
Assigned to SAMSUNG ELECTRONICS CO., LTD., Suwon-si (KR)
Filed by Samsung Electronics Co., Ltd., Suwon-si (KR)
Filed on May 25, 2023, as Appl. No. 18/202,155.
Claims priority of application No. 10-2022-0123650 (KR), filed on Sep. 28, 2022.
Prior Publication US 2024/0105417 A1, Mar. 28, 2024
Int. Cl. H01J 37/20 (2006.01); H01J 37/26 (2006.01)
CPC H01J 37/20 (2013.01) [H01J 37/261 (2013.01); H01J 2237/2007 (2013.01)] 20 Claims
OG exemplary drawing
 
8. A sample holder comprising:
a head; and
a plurality of holding plates extending in a first direction from one surface of the head and each of the plurality of holding plates including at least one sample hole configured to accommodate at least one sample and a main surface configured such that the at least one sample accommodated in the at least one sample hole is exposed at the main surface,
wherein directions perpendicular to respective main surfaces of at least two holding plates of the plurality of holding plates differ from each other, and
at least one holding plate of the plurality of holding plates comprises:
an internal space configured such that the at least one sample is arranged in the internal space, and such that at least a portion of a lower surface and at least a portion of an upper surface of the at least one sample are exposed to outside of the at least one holding plate;
a prop configured to support a lower surface of the at least one sample; and
a fastener configured to plug an edge of the upper surface of the at least one sample.