US 12,444,518 B2
Energy beam irradiation device
Dai Haraguchi, Hamamatsu (JP)
Assigned to HAMAMATSU PHOTONICS K.K., Hamamatsu (JP)
Appl. No. 17/918,153
Filed by HAMAMATSU PHOTONICS K.K., Hamamatsu (JP)
PCT Filed Jan. 28, 2021, PCT No. PCT/JP2021/003091
§ 371(c)(1), (2) Date Oct. 11, 2022,
PCT Pub. No. WO2021/210239, PCT Pub. Date Oct. 21, 2021.
Claims priority of application No. 2020-071472 (JP), filed on Apr. 13, 2020.
Prior Publication US 2023/0134054 A1, May 4, 2023
Int. Cl. G21K 5/00 (2006.01); H01J 1/88 (2006.01); H01J 33/04 (2006.01)
CPC G21K 5/00 (2013.01) [H01J 33/04 (2013.01); H01J 1/88 (2013.01)] 9 Claims
OG exemplary drawing
 
1. An electron beam emission device comprising:
an electron discharge unit having a long electron discharge part;
a housing having a window from which electron beams are emitted on the basis of electrons discharged from the electron discharge part; and
a unit accommodation part fixed in the housing, having a long tubular shape capable of accommodating the electron discharge unit, and having an electron discharge opening formed in a portion of an outer peripheral surface facing the window,
wherein a plurality of positioning parts are provided along a circumferential direction on an outer surface of the electron discharge unit or on an inner surface of the unit accommodation part, the positioning parts being slidably in contact with the outer surface of the electron discharge unit or the inner surface of the unit accommodation part and performing positioning of the electron discharge part with respect to the unit accommodation part,
wherein when the electron discharge unit is oriented to emit the electron beams in a horizontal direction, at least one of the plurality of positioning parts is positioned on a portion of the outer surface of the electron discharge unit or on a portion of the inner surface of the unit accommodation part that faces a downward direction of gravity,
wherein when the electron discharge unit is oriented to emit the electron beams in a vertical direction, at least one of the plurality of positioning parts is positioned on a portion of the outer surface of the electron discharge unit or on a portion of the inner surface of the unit accommodation part that faces a downward direction of gravity,
wherein the electron discharge unit is capable of being inserted into the unit accommodation part from an end of the unit accommodation part,
wherein the plurality of positioning parts are provided in an extending direction of the electron discharge part, and
wherein positioning parts of the plurality of positioning parts are provided on the outer surface of the electron discharge unit at each of a plurality of positions in the extending direction of the electron discharge part on a tip end side of the electron discharge unit with respect to a central position in the extending direction of the electron discharge part, in an insertion direction of the electron discharge unit into the unit accommodation part.