US 12,444,155 B2
Robust image-to-design alignment for dram
Hucheng Lee, Cupertino, CA (US); and Huan Jin, Dublin, CA (US)
Assigned to KLA CORPORATION, Milpitas, CA (US)
Filed by KLA Corporation, Milpitas, CA (US)
Filed on Oct. 4, 2023, as Appl. No. 18/480,503.
Claims priority of provisional application 63/534,581, filed on Aug. 25, 2023.
Prior Publication US 2025/0069354 A1, Feb. 27, 2025
Int. Cl. G06V 10/24 (2022.01); G06F 9/455 (2018.01); G06V 10/762 (2022.01)
CPC G06V 10/24 (2022.01) [G06F 9/45516 (2013.01); G06V 10/762 (2022.01)] 20 Claims
OG exemplary drawing
 
1. A system configured for determining an offset for use in a process performed on a specimen, comprising:
an imaging subsystem configured for generating images of a specimen; and
a computer subsystem configured for:
determining first and second align-to-design offsets for multiple instances of an alignment target by separately aligning images of the multiple instances of the alignment target formed on the specimen and generated by the imaging subsystem to a rendered image for the alignment target with first and second alignment methods, respectively;
identifying the multiple instances having a difference between the first and second align-to-design offsets below a predetermined threshold;
determining a runtime align-to-design offset for the alignment target from the first and second align-to-design offsets determined for only the identified multiple instances; and
storing the runtime align-to-design offset for use in a process performed on the specimen with the imaging subsystem.