US 12,444,022 B2
Focus stacking applications for sample preparation
Matej Dolník, Brno (CZ); Radim Kříž, Slapanice (CZ); and Lukáš Malý, Brno (CZ)
Assigned to FEI Company, Hillsboro, OR (US)
Filed by FEI Company, Hillsboro, OR (US)
Filed on Jun. 30, 2023, as Appl. No. 18/217,129.
Prior Publication US 2025/0005714 A1, Jan. 2, 2025
Int. Cl. G06T 5/50 (2006.01); G01N 1/28 (2006.01); G06T 7/55 (2017.01); G06T 7/73 (2017.01); H01J 37/08 (2006.01); H01J 37/22 (2006.01); H01J 37/304 (2006.01); H01J 37/305 (2006.01)
CPC G06T 5/50 (2013.01) [G01N 1/2813 (2013.01); G06T 7/55 (2017.01); G06T 7/73 (2017.01); H01J 37/08 (2013.01); H01J 37/222 (2013.01); H01J 37/3045 (2013.01); H01J 37/305 (2013.01); G06T 2207/10061 (2013.01); G06T 2207/10064 (2013.01); G06T 2207/20212 (2013.01); H01J 2237/31745 (2013.01); H01J 2237/31749 (2013.01)] 21 Claims
OG exemplary drawing
 
1. An apparatus comprising:
a tool configured to perform a localized operation on a sample using a first beam;
an imager configured to acquire a plurality of images of the sample using a second beam; and
a controller configured to:
focus stack the plurality of images to obtain a composite image;
responsive to a particular location being selected in the composite image, receive an indication of the particular location; and
responsive to the received indication of the particular location, cause the tool to perform the localized operation based on the particular location.