US 12,443,175 B2
Eco-efficiency (sustainability) dashboard for semiconductor manufacturing
Ala Moradian, San Jose, CA (US); Elizabeth Neville, Sunnyvale, CA (US); Umesh Madhav Kelkar, Cupertino, CA (US); Mark R. Denome, Sunnyvale, CA (US); Prashanth Kothnur, San Jose, CA (US); Karthik Ramanathan, Karnataka (IN); Kartik Shah, Saratoga, CA (US); Orlando Trejo, Santa Clara, CA (US); and Sergey Meirovich, Austin, TX (US)
Assigned to Applied Materials, Inc., Santa Clara, CA (US)
Filed by Applied Materials, Inc., Santa Clara, CA (US)
Filed on May 30, 2024, as Appl. No. 18/679,298.
Application 18/679,298 is a division of application No. 17/230,897, filed on Apr. 14, 2021, granted, now 12,001,197.
Prior Publication US 2024/0310819 A1, Sep. 19, 2024
Int. Cl. G05B 19/418 (2006.01); G05B 13/02 (2006.01); H01L 21/67 (2006.01)
CPC G05B 19/41885 (2013.01) [G05B 13/027 (2013.01); G05B 2219/32335 (2013.01); G05B 2219/32359 (2013.01); G05B 2219/45031 (2013.01); H01L 21/67276 (2013.01)] 18 Claims
OG exemplary drawing
 
1. A system comprising:
a memory; and
a processing device, coupled to the memory, to:
receive a first selection of at least one of a first fabrication process or a first manufacturing equipment to perform manufacturing operations of the first fabrication process;
input the first selection into a digital replica of the first manufacturing equipment, wherein the digital replica outputs physical conditions of the first fabrication process;
determine environmental resource usage data indicative of a first environmental resource consumption of the first fabrication process run on the first manufacturing equipment based on the physical conditions of the first fabrication process;
determine, within a process parameter value window, an eco-optimized process parameter window, wherein one or more process parameter values are within the eco-optimized process parameter window;
determine a modification to the first fabrication process that reduces the first environmental resource consumption of the first fabrication process run on the first manufacturing equipment based on the one or more process parameter values of the eco-optimized process parameter window; and
perform at least one of a) applying the modification to the first fabrication process or b) providing the modification for display by a graphical user interface (GUI).