US 12,443,113 B2
Overlay target
Yu-Wei Cheng, Kaohsiung (TW)
Assigned to United Microelectronics Corp., Hsinchu (TW)
Filed by United Microelectronics Corp., Hsinchu (TW)
Filed on Nov. 3, 2022, as Appl. No. 17/979,765.
Claims priority of application No. 111137003 (TW), filed on Sep. 29, 2022.
Prior Publication US 2024/0111220 A1, Apr. 4, 2024
Int. Cl. G03F 7/00 (2006.01)
CPC G03F 7/70633 (2013.01) 18 Claims
OG exemplary drawing
 
1. An overlay target, comprising:
a plurality of working zones; and a plurality of line segments in each of the working zones, wherein in each of the working zones, the plurality of line segments are parallel to each other in an arrangement direction, have a plurality of widths in the arrangement direction, and have the same length in an extension direction perpendicular to the arrangement direction; wherein the overlay target has a center, and the working zones surround the center; and wherein the line segments comprise a first line segment and a second line segment, the second line segment is farther from the center than the first line segment, the second line segment has a second width, and the second width is greater than a first width of the first line segment.