US 12,443,109 B2
EUV collector
Valentin Jonatan Bolsinger, Aalen (DE)
Assigned to Carl Zeiss SMT GmbH, Oberkochen (DE)
Filed by Carl Zeiss SMT GmbH, Oberkochen (DE)
Filed on Dec. 29, 2022, as Appl. No. 18/147,976.
Application 18/147,976 is a continuation of application No. PCT/EP2021/065907, filed on Jun. 14, 2021.
Claims priority of application No. 102020208298.7 (DE), filed on Jul. 2, 2020.
Prior Publication US 2023/0146235 A1, May 11, 2023
Int. Cl. G03F 7/00 (2006.01)
CPC G03F 7/70033 (2013.01) 20 Claims
OG exemplary drawing
 
1. An EUV collector, comprising:
a reflection surface comprising a basic mirror shape of a spherical section; and
a diffraction grating supported by the reflection surface,
wherein:
the diffraction grating is configured so that, during use of the EUV collector, used light emanates from a sphere center of the spherical section and is diffracted by the diffraction grating toward a collection region; and
the collection region is spatially spaced apart from the sphere center.