US 12,443,085 B2
Counter electrode for electrochromic devices
Dane Gillaspie, Collierville, TN (US); Sridhar K. Kailasam, Fremont, CA (US); and Robert T. Rozbicki, Saratoga, CA (US)
Assigned to View Operating Corporation, San Jose, CA (US)
Filed by View Operating Corporation, San Jose, CA (US)
Filed on Mar. 20, 2024, as Appl. No. 18/611,458.
Application 18/611,458 is a continuation of application No. 17/810,656, filed on Jul. 5, 2022, granted, now 11,966,140.
Application 17/810,656 is a continuation of application No. 15/931,359, filed on May 13, 2020, granted, now 11,409,177, issued on Aug. 9, 2022.
Application 15/931,359 is a continuation of application No. 16/168,587, filed on Oct. 23, 2018, granted, now 1,069,987, issued on Jun. 23, 2020.
Application 16/168,587 is a continuation of application No. 15/527,194, granted, now 10,156,762, issued on Dec. 18, 2018, previously published as PCT/US2015/061995, filed on Nov. 20, 2015.
Application 16/168,587 is a continuation of application No. 15/214,340, filed on Jul. 19, 2016, granted, now 9,904,138, issued on Feb. 27, 2018.
Application 15/527,194 is a continuation of application No. 13/610,716, filed on Sep. 11, 2012, granted, now 9,429,809, issued on Aug. 30, 2016.
Application 13/610,716 is a continuation of application No. 12/645,111, filed on Dec. 22, 2009, granted, now 9,664,974, issued on May 30, 2017.
Claims priority of provisional application 61/165,484, filed on Mar. 31, 2009.
Claims priority of provisional application 62/192,443, filed on Jul. 14, 2015.
Claims priority of provisional application 62/085,096, filed on Nov. 26, 2014.
Prior Publication US 2024/0264504 A1, Aug. 8, 2024
This patent is subject to a terminal disclaimer.
Int. Cl. G02F 1/153 (2006.01); B23K 20/10 (2006.01); C03C 17/34 (2006.01); C23C 10/28 (2006.01); C23C 14/08 (2006.01); C23C 14/18 (2006.01); C23C 14/34 (2006.01); C23C 14/58 (2006.01); G02B 26/00 (2006.01); G02F 1/03 (2006.01); G02F 1/133 (2006.01); G02F 1/1343 (2006.01); G02F 1/1523 (2019.01); G02F 1/155 (2006.01); G09G 3/38 (2006.01); G02F 1/15 (2019.01)
CPC G02F 1/1525 (2013.01) [B23K 20/10 (2013.01); C03C 17/3417 (2013.01); C23C 10/28 (2013.01); C23C 14/083 (2013.01); C23C 14/085 (2013.01); C23C 14/185 (2013.01); C23C 14/3407 (2013.01); C23C 14/5806 (2013.01); C23C 14/5853 (2013.01); G02F 1/13439 (2013.01); G02F 1/1523 (2013.01); G02F 1/155 (2013.01); C03C 2217/94 (2013.01); G02F 2001/1502 (2013.01); G02F 2001/1555 (2013.01)] 16 Claims
OG exemplary drawing
 
1. An integrated deposition system for fabricating an electrochromic device stack, the system comprising:
a plurality of deposition stations aligned in series and interconnected and operable to pass a substrate from one station to the next without exposing the substrate to an external environment, wherein the plurality of deposition stations comprise
(i) a first deposition station containing one or more material sources for depositing a cathodically coloring layer;
(ii) a second deposition station containing one or more material sources for depositing an anodically coloring layer comprising nickel tungsten tantalum oxide, wherein the nickel tungsten tantalum oxide has an atomic ratio of Ni:(W+Ta) that is between 1.8:1 and 3:1, and has an atomic ratio of W:Ta that is between 1:1 and 2:1; and
a controller containing program instructions for passing the substrate through the plurality of deposition stations in a manner that deposits on the substrate (i) the cathodically coloring layer, and (ii) two or more sub-layers of the anodically coloring layer to form a stack comprising at least the cathodically coloring layer and the anodically coloring layer, wherein the two or more sub-layers have different compositions and/or different relative concentration, and wherein a first sub-layer of the two or more sub-layers comprises a binary metal oxide and a second sub-layer of the two or more sub-layers comprises a ternary metal oxide.