US 12,442,985 B2
Semiconductor structure and method of manufacturing the same
Feng-Wei Kuo, Hsinchu County (TW); Chewn-Pu Jou, Hsinchu (TW); Hsing-Kuo Hsia, Hsinchu County (TW); and Chih-Wei Tseng, Hsinchu (TW)
Assigned to TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD., Hsinchu (TW)
Filed by TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD., Hsinchu (TW)
Filed on Jun. 17, 2022, as Appl. No. 17/842,783.
Prior Publication US 2023/0408768 A1, Dec. 21, 2023
Int. Cl. G02B 6/32 (2006.01); G02B 6/12 (2006.01); G02B 6/30 (2006.01); G02B 6/42 (2006.01)
CPC G02B 6/32 (2013.01) [G02B 6/30 (2013.01); G02B 6/4214 (2013.01); G02B 2006/12104 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A semiconductor structure, comprising:
a substrate;
a dielectric layer, disposed over a first surface of the substrate; and
a first optical reflective layer disposed within the dielectric layer, wherein the first optical reflective layer has a first inclined surface;
a second optical reflective layer, disposed below the first optical reflective layer and within the dielectric layer, wherein the second optical reflective layer has a second inclined surface;
a first optical guiding layer disposed within the dielectric layer and adjacent to the first optical reflective layer, wherein
when an optical signal is transmitted in the dielectric layer, a first portion of the optical signal is transmitted toward the first optical reflective layer in a first direction, and wherein when the first portion of the optical signal is reflected by the first inclined surface of the first optical reflective layer, the first portion of the optical signal is transmitted in the dielectric layer toward a first sidewall of the first optical guiding layer in a second direction,
a second optical guiding layer disposed below the first optical guiding layer, within the dielectric layer, and adjacent to the second optical reflective layer, wherein when a second portion of the optical signal is transmitted in the dielectric layer, the second portion of the optical signal is transmitted toward the second optical reflective layer in the first direction, and wherein when the second portion of the optical signal is reflected by the second inclined surface of the second optical reflective layer, the second portion of the optical signal is transmitted in the dielectric layer toward a second sidewall of the second optical guiding layer in the second direction, wherein the first optical guiding layer and the second optical guiding layer are substantially parallel to each other, wherein the second inclined surface of the second optical reflective layer faces the second sidewall of the second optical guiding layer, and wherein the first sidewall of the first optical guiding layer is coplanar with the second sidewall of the second optical guiding layer.