| CPC G01S 7/4817 (2013.01) [G01S 17/931 (2020.01); G02B 5/04 (2013.01); G02B 26/085 (2013.01); G02B 26/0875 (2013.01); G02B 26/0891 (2013.01); G02B 26/10 (2013.01); G02B 26/108 (2013.01)] | 15 Claims |
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1. An optical sensing system, comprising:
a laser emitter, configured to sequentially emit a series of optical signals;
a plurality of prisms, configured to receive the series of optical signals and sequentially direct the series of optical signals at different directions in an angle of view of the optical sensing system, wherein at least one prism of the plurality of prisms is configured to rotate relative to at least one other prism of the plurality of prisms to refract the optical signals towards the respective different directions;
a plurality of micro-electromechanical system (MEMS)-based angular comb drive actuators configured to individually rotate each prism, wherein the plurality of MEMS-based angular comb drive actuators are circularly mounted around an outer edge of a respective ring-shaped mounting structure corresponding to one prism in the plurality of prisms, and each prism is fixedly mounted around an inner edge of its respective ring-shaped mounting structure such that its surface upon which the series of optical signals impinge is parallel to a plane formed by the inner edge of its respective ring-shaped mounting structure, wherein each MEMS-based angular comb drive actuator comprises a set of stationary teeth, a set of rotary teeth, a first stationary anchor, an elongated beam, a single spring structure, and a second stationary anchor, the set of stationary teeth are coupled to the first stationary anchor, the set of rotary teeth are coupled to a first side of the elongated beam, the elongated beam comprises a first end coupled to the outer edge of its ring-shaped mounting structure and a second end coupled to the second stationary anchor via the single spring structure, the single spring structure is the only spring structure coupled to the elongated beam, and a direction normal to the plane in which the single spring structure provides compliance is parallel to a center axis around which its corresponding ring-shaped mounting structure rotates; and
a receiver, configured to receive at least a portion of the series of optical signals reflected from an environment surrounding the optical sensing system.
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