US 12,442,876 B2
Magnetic sensor, detection unit, detection system, substrate for magnetic sensor, waveguide body for magnetic sensor, opto-electric hybrid substrate for magnetic sensor, and detection substrate for detection unit
Yuji Kishida, Tsukuba (JP)
Assigned to KYOCERA Corporation, Kyoto (JP)
Filed by KYOCERA Corporation, Kyoto (JP)
Filed on Apr. 19, 2023, as Appl. No. 18/302,846.
Application 18/302,846 is a continuation of application No. PCT/JP2021/038101, filed on Oct. 14, 2021.
Claims priority of application No. 2020-180542 (JP), filed on Oct. 28, 2020.
Prior Publication US 2023/0258754 A1, Aug. 17, 2023
Int. Cl. G01R 33/26 (2006.01); G01R 33/345 (2006.01); G01R 33/60 (2006.01)
CPC G01R 33/26 (2013.01) [G01R 33/345 (2013.01); G01R 33/60 (2013.01)] 11 Claims
OG exemplary drawing
 
1. A magnetic sensor comprising:
a substrate; and
a waveguide body in contact with the substrate,
the substrate comprising
on a surface not in contact with the waveguide body, a first layer comprising a diamond crystal in which a nitrogen vacancy (NV) center is disposed, and on a surface in contact with the waveguide body, a second layer on which a conductive pattern is disposed;
the waveguide body comprising
a line configured to transmit a microwave that generates electron spin resonance to the conductive pattern, and
an optical waveguide configured to transmit exciting light and receive fluorescence, the exciting light irradiating the first layer of the substrate and emitting the fluorescence, the fluorescence having light intensity changed by electron spin resonance in the first layer of the substrate.