US 12,442,794 B2
Molecular sensor, molecular detection device, and molecular detection method
Yasushi Shinjo, Kawasaki Kanagawa (JP); Hirohisa Miyamoto, Kamakura Kanagawa (JP); and Reiko Yoshimura, Kawasaki Kanagawa (JP)
Assigned to Kabushiki Kaisha Toshiba, Kawasaki (JP)
Filed by Kabushiki Kaisha Toshiba, Tokyo (JP)
Filed on Feb. 27, 2023, as Appl. No. 18/175,017.
Claims priority of application No. 2022-148154 (JP), filed on Sep. 16, 2022.
Prior Publication US 2024/0118244 A1, Apr. 11, 2024
Int. Cl. G01N 29/00 (2006.01); G01N 29/036 (2006.01); G01N 29/24 (2006.01)
CPC G01N 29/036 (2013.01) [G01N 29/2443 (2013.01); G01N 2291/014 (2013.01); G01N 2291/021 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A molecular sensor comprising:
a sensitive film including a plurality of metal organic framework particles; and
a detector configured to be capable of measuring a change in physical quantity due to adsorption of a target molecule to the sensitive film,
wherein pores are present between the plurality of metal organic framework particles, the pores are any of mesopores of 2 nm or more and 50 nm or less, micropores smaller than the mesopores, and macropores larger than the mesopores, and
when a sum of areas of the micropores is defined as Smi, a sum of areas of the mesopores is defined as Sme, a sum of areas of the macropores is defined as Sma, and an area of an entire image analysis area is defined as Stotal, in an image analysis area by two-dimensional image analysis on a cross section of the sensitive film in a thickness direction,
pore distribution by the two-dimensional image analysis satisfies
0.35≤Sme/(Smi+Sme+Sma),
0.01≤(Smi+Sme+Sma)/Stotal≤0.5.