US 12,442,782 B2
Gas sensor, manufacturing method, and detection method
Helmut Grutzeck, Kusterdingen (DE); Renate Mueller, Reutlingen (DE); and Stefan Zehringer, Reutlingen (DE)
Assigned to ROBERT BOSCH GMBH, Stuttgart (DE)
Filed by Robert Bosch GmbH, Stuttgart (DE)
Filed on Jan. 5, 2023, as Appl. No. 18/150,471.
Claims priority of application No. 10 2022 200 184.2 (DE), filed on Jan. 11, 2022.
Prior Publication US 2023/0221270 A1, Jul. 13, 2023
Int. Cl. G01N 25/18 (2006.01); G01N 27/22 (2006.01); G01N 35/00 (2006.01); G01R 27/26 (2006.01)
CPC G01N 25/18 (2013.01) [G01N 27/221 (2013.01); G01N 35/00584 (2013.01); G01R 27/2629 (2013.01); G01N 2027/222 (2013.01); G01N 2035/00306 (2013.01)] 12 Claims
OG exemplary drawing
 
1. A gas sensor for determining a physical and/or chemical value of an analysis gas using a thermal conductivity measurement, the gas sensor comprising:
at least one first diaphragm including a first double meander structure made up of two resistor lines;
an evaluator; and
a second diaphragm that is separate from the first diaphragm, the second diaphragm including a second double meander structure made up of two resistor lines, and the second double meander structure having a resistance value that is different from the first double meander structure;
wherein the resistor lines are energized in opposite directions for the thermal conductivity measurement, and the evaluator is configured to determine at least one physical and/or chemical value that represents a property of the analysis gas, as a function of detected voltages at the double meander structure as part of a Wheatstone bridge circuit.