| CPC G01N 1/4077 (2013.01) [B01D 63/005 (2013.01); B01L 3/502761 (2013.01); B01L 3/567 (2013.01); G01N 1/38 (2013.01); B01L 2200/0652 (2013.01); B01L 2300/123 (2013.01); B01L 2300/165 (2013.01); B01L 2400/0605 (2013.01); B01L 2400/086 (2013.01)] | 16 Claims |

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1. A multilevel extraction chamber, comprising:
a main channel,
a secondary channel fluidly connected to the main channel,
a plasma channel fluidly connected to the secondary channel,
a first set of a plurality of side channels fluidly connecting the main channel to the secondary channel, and
a second set of a plurality of side channels fluidly connecting the secondary channel to the plasma channel,
wherein each of the first set of side channels has an average diameter that is greater than the average diameter of each of the second set of side channels,
the main channel has an average diameter of 0.2-5 mm at a narrowest cross section, and
the first set of the plurality of side channels, and each of the second set of the plurality of side channel, each have an average diameter of 5-100 μm at the narrowest cross section.
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