US 12,442,706 B2
Diaphragm pressure gauge and compound pressure gauge
Hisao Hojoh, Musashino (JP)
Assigned to Q'z Corporation, Kodaira (JP)
Filed by Q'z CORPORATION, Kodaira (JP)
Filed on Dec. 15, 2022, as Appl. No. 18/066,358.
Claims priority of application No. 2022-045867 (JP), filed on Mar. 22, 2022.
Prior Publication US 2023/0304883 A1, Sep. 28, 2023
Int. Cl. G01L 21/00 (2006.01); G01L 13/02 (2006.01); G01L 21/32 (2006.01)
CPC G01L 13/026 (2013.01) [G01L 13/023 (2013.01); G01L 21/00 (2013.01); G01L 21/32 (2013.01)] 14 Claims
OG exemplary drawing
 
1. A diaphragm pressure gauge, comprising:
a structure disposed under pressure to be measured;
two diaphragms attached to the structure so as to oppose each other; and
a detection element having both ends that are fixed to the two diaphragms to detect displacements of the two diaphragms,
wherein the two diaphragms include two opposing surfaces and two non-opposing surfaces, an airtight space surrounded by the structure and the two diaphragms is kept in a reference vacuum, and the two diaphragms are displaced according to a differential pressure between the reference vacuum acting on the two opposing surfaces and the pressure to be measured acting on the two non-opposing surfaces, and the displacements of the two diaphragms have equal absolute values in opposite directions.