US 12,442,686 B2
Optical device and spectroscopy apparatus
Kohei Yamada, Shiojiri (JP)
Assigned to SEIKO EPSON CORPORATION, (JP)
Filed by SEIKO EPSON CORPORATION, Tokyo (JP)
Filed on Jul. 26, 2023, as Appl. No. 18/359,191.
Claims priority of application No. 2022-119937 (JP), filed on Jul. 27, 2022.
Prior Publication US 2024/0035889 A1, Feb. 1, 2024
Int. Cl. G01J 3/28 (2006.01); G01J 3/02 (2006.01)
CPC G01J 3/28 (2013.01) [G01J 3/021 (2013.01)] 17 Claims
OG exemplary drawing
 
1. An optical device comprising:
a first optical system; and
a second optical system, wherein
the first optical system includes
a first light splitting device configured to split measurement light emitted from a first light source into a first measurement light and a second measurement light and then mix the first measurement light and the second measurement light,
a first mirror configured to add a first modulation signal to the first measurement light by being moved with respect to the first light splitting device in an entering direction of the first measurement light and reflecting the first measurement light,
a second mirror configured to reflect the second measurement light, and
a first light receiving device configured to receive the measurement light including a sample-derived signal derived from a sample and the first modulation signal and output a first light receiving signal, and
the second optical system includes
a second light source configured to emit laser light,
an optical modulator configured to add a second modulation signal to the laser light, and
a second light receiving device configured to receive the laser light including a displacement signal generated by reflection on the first mirror and the second modulation signal and output a second light receiving signal.