US 12,442,635 B2
Substrate processing apparatus, substrate processing method, and storage medium
Hirokazu Kyokane, Yamanashi (JP); Hidefumi Matsui, Yamanashi (JP); Toshiyuki Fukumoto, Yamanashi (JP); Satoshi Itoh, Yamanashi (JP); Masashi Imanaka, Yamanashi (JP); Toyohisa Tsuruda, Yamanashi (JP); Masashi Enomoto, Yamanashi (JP); and Masahiro Yanagisawa, Yamanashi (JP)
Assigned to Tokyo Electron Limited, Tokyo (JP)
Filed by Tokyo Electron Limited, Tokyo (JP)
Filed on Sep. 6, 2022, as Appl. No. 17/903,444.
Claims priority of application No. 2021-149547 (JP), filed on Sep. 14, 2021.
Prior Publication US 2023/0085325 A1, Mar. 16, 2023
Int. Cl. G01B 11/06 (2006.01); G06T 7/60 (2017.01)
CPC G01B 11/0616 (2013.01) [G06T 7/60 (2013.01); G06T 2207/20081 (2013.01); G06T 2207/30148 (2013.01)] 9 Claims
OG exemplary drawing
 
1. A substrate processing apparatus comprising:
an imaging portion configured to acquire a surface image of a film formed on a surface of a substrate, including:
a housing accommodating the substrate; and
a camera imaging the surface image of the film formed on the surface of the substrate; and
a controller including a processor and a memory storing instructions thereon, the instructions when executed by the processor cause the processor to:
estimate an optical property of the film based on process information acquired during formation of the film by inputting the process information into an optical property model that represents a relationship between the process information and the optical property, and the optical property model outputting the estimated optical property of the film in response to the process information, wherein the optical property includes at least one of a refractive index and an extinction coefficient and the process information includes surrounding environment information of the substrate when the film is formed on the surface of the substrate;
estimate a film thickness of the film by inputting the surface image into a film thickness model that represents a relationship between the surface image and the film thickness, the film thickness model outputting an estimated thickness of the film in response to the surface image; and
correct the estimated thickness of the film based on the estimated optical property output by the optical property model.