US 12,442,633 B2
Position measurement device and position measurement method
Shinji Sato, Fukaya (JP)
Assigned to NIKON CORPORATION, Tokyo (JP)
Appl. No. 18/567,782
Filed by NIKON CORPORATION, Tokyo (JP)
PCT Filed Jun. 11, 2021, PCT No. PCT/JP2021/022363
§ 371(c)(1), (2) Date Dec. 7, 2023,
PCT Pub. No. WO2022/259536, PCT Pub. Date Dec. 15, 2022.
Prior Publication US 2024/0393100 A1, Nov. 28, 2024
Int. Cl. G01B 11/00 (2006.01); B25J 9/16 (2006.01)
CPC G01B 11/005 (2013.01) [B25J 9/1697 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A position measurement device comprising:
circuitry configured to
irradiate measurement light to a reflective element;
receive reflected light reflected by the reflective element;
acquire position information of the reflective element in a three-dimensional space;
irradiate reference measurement light to at least one reference reflective element;
receive reference reflected light reflected by the reference reflective element;
acquire position information of the reference reflective element in a three-dimensional space; and
correct the position information of the reflective element using the position information of the reference reflective element.