US 12,442,307 B2
Steam turbine member
Yuya Nakashima, Hachioji (JP); Masato Hirota, Yokohama (JP); and Naoya Yoshimi, Tokyo (JP)
Assigned to FUJI ELECTRIC CO., LTD., Kawasaki (JP)
Filed by FUJI ELECTRIC CO., LTD., Kawasaki (JP)
Filed on Oct. 25, 2022, as Appl. No. 17/972,736.
Application 17/972,736 is a continuation of application No. PCT/JP2021/036593, filed on Oct. 4, 2021.
Claims priority of application No. 2020-192605 (JP), filed on Nov. 19, 2020.
Prior Publication US 2023/0044725 A1, Feb. 9, 2023
Int. Cl. F01D 5/28 (2006.01); F01D 9/02 (2006.01)
CPC F01D 5/288 (2013.01) [F01D 9/02 (2013.01); F05D 2220/31 (2013.01); F05D 2300/506 (2013.01); F05D 2300/516 (2013.01); F05D 2300/604 (2013.01); F05D 2300/611 (2013.01)] 7 Claims
OG exemplary drawing
 
1. A steam turbine member comprising:
a base material comprising metal;
a first inorganic layer formed on the base material, the first inorganic layer comprising one or more inorganic compounds selected from WC, TiC, SiO2, Al2O3, TiN, ZrN, CrN, TiCN, TiAlN, TiCrN, ZrO2 and CoNiCrAlY;
a second inorganic layer formed on the first inorganic layer on a side opposite to the base material, the second inorganic layer comprising one or more inorganic compounds selected from WC, TiC, SiO2, Al2O3, TiN, ZrN, CrN, TICN, TiAlN, TiCrN, ZrO2 and CoNiCrAlY; and
a deposited amorphous carbon film formed on the second inorganic layer on a side opposite to the first inorganic layer,
wherein the second inorganic layer has a hardness greater than a hardness of the first inorganic layer, and the deposited carbon film has a maximum height roughness Rz of more than 1.0 μm and equal to or less than 6.3 μm.