US 12,442,082 B2
Reactor system comprising a tuning circuit
Ryu Nakano, Sagamihara (JP); and Fumitaka Shoji, Kawasaki (JP)
Assigned to ASM IP Holding B.V., Almere (NL)
Filed by ASM IP Holding B.V., Almere (NL)
Filed on May 4, 2021, as Appl. No. 17/307,643.
Claims priority of provisional application 63/021,592, filed on May 7, 2020.
Prior Publication US 2021/0348273 A1, Nov. 11, 2021
Int. Cl. C23C 16/458 (2006.01); H01L 21/67 (2006.01); H01L 21/683 (2006.01)
CPC C23C 16/4586 (2013.01) [H01L 21/6833 (2013.01); H01L 21/67069 (2013.01)] 19 Claims
OG exemplary drawing
 
1. A susceptor assembly for a reactor system, comprising:
a susceptor body defined by a susceptor outer edge, the susceptor body comprising a susceptor outer portion and a susceptor inner portion, wherein the susceptor outer portion is proximate the susceptor outer edge, and the susceptor inner portion is at least partially enclosed within the susceptor outer portion;
a first tuning circuit comprising an edge electrode and a first resonance circuit coupled to the edge electrode, wherein the edge electrode is coupled to the susceptor body; and
a second tuning circuit comprising a center electrode and a second resonance circuit coupled to the center electrode, wherein the center electrode is coupled to the susceptor body;
wherein the edge electrode is disposed more proximate the susceptor outer edge than the center electrode,
wherein the edge electrode and the center electrode are on a same plane, wherein the center electrode is between 0.05 and 0.15 cm from a top surface of the susceptor body, and
wherein the first resonance circuit consists of:
a first node, a second node, a first inductor and a first variable capacitor coupled in series to ground, and a first capacitor coupled in parallel to the first inductor and the first variable capacitor, wherein the first capacitor connects the first node to the second node, and wherein the first inductor and the first variable capacitor coupled in series connects the first node to the second node, and
wherein the second resonance circuit comprises:
a second inductor and a second variable capacitor coupled in series to ground and a second capacitor coupled in parallel to the second inductor and the second variable capacitor.