US 12,442,075 B2
Ozone gas supply system
Tetsuya Nishiguchi, Tokyo (JP); Yoshiki Morikawa, Shizuoka (JP); and Hiroaki Yamashita, Chiba (JP)
Assigned to MEIDEN NANOPROCESS INNOVATIONS, INC., Tokyo (JP)
Appl. No. 18/881,710
Filed by MEIDEN NANOPROCESS INNOVATIONS, INC., Tokyo (JP)
PCT Filed Jun. 13, 2023, PCT No. PCT/JP2023/021827
§ 371(c)(1), (2) Date Jan. 6, 2025,
PCT Pub. No. WO2024/009699, PCT Pub. Date Jan. 11, 2024.
Claims priority of application No. 2022-110562 (JP), filed on Jul. 8, 2022.
Prior Publication US 2025/0257456 A1, Aug. 14, 2025
Int. Cl. C23C 16/455 (2006.01); C23C 16/52 (2006.01)
CPC C23C 16/45534 (2013.01) [C23C 16/52 (2013.01)] 12 Claims
OG exemplary drawing
 
1. An ozone gas supply system comprising:
a buffer tank structured to temporarily store a high-concentration ozone gas having an ozone concentration of 80% or more by volume, and supply the high-concentration ozone gas to an ozone gas utilization system, wherein the high-concentration ozone gas is supplied to the buffer tank from an ozone vessel of an ozone gas supply unit; and
a control section configured to detect a decrease in the ozone concentration in the buffer tank, based on a value of pressure of the ozone vessel at a predetermined temperature of the ozone vessel, with reference to a relationship between temperature and pressure of an ozone gas having an ozone concentration of 100% by volume and a relationship between temperature and pressure of an ozone gas having an ozone concentration of less than 100% by volume, wherein the ozone vessel is communicating with the buffer tank;
wherein, in response to detection of a decrease in the ozone concentration in the buffer tank, gas within the buffer tank and gas supply piping is exhausted out of the ozone gas supply system, and after the exhausting, the high-concentration ozone gas is supplied from the ozone vessel to the buffer tank, wherein the gas supply piping connects the buffer tank and the ozone vessel.