US 12,442,072 B2
Atomic layer deposition coatings for high temperature ceramic components
Xiaowei Wu, San Jose, CA (US); Jennifer Y. Sun, Mountain View, CA (US); and Michael R. Rice, Pleasanton, CA (US)
Assigned to Applied Materials, Inc., Santa Clara, CA (US)
Filed by Applied Materials, Inc., Santa Clara, CA (US)
Filed on Nov. 22, 2021, as Appl. No. 17/532,693.
Application 17/532,693 is a division of application No. 16/211,335, filed on Dec. 6, 2018, granted, now 11,180,847.
Prior Publication US 2022/0081762 A1, Mar. 17, 2022
Int. Cl. C23C 16/40 (2006.01); C23C 16/455 (2006.01)
CPC C23C 16/40 (2013.01) [C23C 16/45553 (2013.01)] 14 Claims
OG exemplary drawing
 
1. A method of forming a coated article, the method comprising:
providing an article adapted for use in a processing chamber, the article having a first coefficient of thermal expansion;
forming an amorphous carbon adhesion layer on one or more surfaces of the article;
selecting a molar ratio of a first rare earth metal-containing ceramic compound to a second rare earth metal-containing ceramic compound, such that a ceramic coating comprising the first and second rare earth metal-containing ceramic compounds in the selected molar ratio being deposited onto the carbon adhesion layer by atomic layer deposition results in the ceramic coating having a second coefficient of thermal expansion that is within 10% of the first coefficient of thermal expansion; and
performing atomic layer deposition to simultaneously deposit both the first rare earth metal-containing ceramic compound and the second rare earth metal-containing ceramic compound onto the carbon adhesion layer, wherein the first rare earth metal-containing ceramic compound comprises Y2O3, and the second rare earth metal-containing ceramic compound comprises YxOyFz.