| CPC C23C 14/505 (2013.01) [C23C 14/042 (2013.01); C23C 14/243 (2013.01); F16H 1/28 (2013.01)] | 20 Claims |

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1. A planetary rotation system for coating, the planetary rotation system comprising:
a solar orbiter plate configured to rotate about a solar axis;
a lunar rotation system mounted to the solar orbiter plate, the lunar rotation system comprising:
a lunar orbiter plate configured to rotate about a planetary axis, and
a plurality of lunar substrate holders mounted on the lunar orbiter plate, wherein respective ones of the lunar substrate holders are configured to hold a substrate for coating and are further configured to rotate about a lunar axis, wherein the respective ones of the lunar substrate holders are further configured to orbit about the planetary axis.
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