US 12,442,071 B2
Planetary rotation system with lunar rotation
James Oliver, Dansville, NY (US)
Assigned to Vacuum Innovations LLC, Dansville, NY (US)
Filed by Vacuum Innovations LLC, Dansville, NY (US)
Filed on Apr. 4, 2024, as Appl. No. 18/626,539.
Claims priority of provisional application 63/494,613, filed on Apr. 6, 2023.
Prior Publication US 2024/0337010 A1, Oct. 10, 2024
Int. Cl. C23C 14/50 (2006.01); C23C 14/04 (2006.01); C23C 14/24 (2006.01); F16H 1/28 (2006.01)
CPC C23C 14/505 (2013.01) [C23C 14/042 (2013.01); C23C 14/243 (2013.01); F16H 1/28 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A planetary rotation system for coating, the planetary rotation system comprising:
a solar orbiter plate configured to rotate about a solar axis;
a lunar rotation system mounted to the solar orbiter plate, the lunar rotation system comprising:
a lunar orbiter plate configured to rotate about a planetary axis, and
a plurality of lunar substrate holders mounted on the lunar orbiter plate, wherein respective ones of the lunar substrate holders are configured to hold a substrate for coating and are further configured to rotate about a lunar axis, wherein the respective ones of the lunar substrate holders are further configured to orbit about the planetary axis.