US 12,442,070 B2
Gas bearing plate with integrated OVJP vacuum source
William E. Quinn, Whitehouse Station, NJ (US); Craig Anthony Outten, Rydal, PA (US); Kent Khuong Nguyen, San Jose, CA (US); Steven Shigeki Aochi, San Jose, CA (US); and Neil D. Nguyen, Milpitas, CA (US)
Assigned to Universal Display Corporation, Ewing, NJ (US)
Filed by Universal Display Corporation, Ewing, NJ (US)
Filed on Jun. 24, 2022, as Appl. No. 17/848,674.
Claims priority of provisional application 63/289,702, filed on Dec. 15, 2021.
Claims priority of provisional application 63/227,688, filed on Jul. 30, 2021.
Claims priority of provisional application 63/217,737, filed on Jul. 1, 2021.
Prior Publication US 2023/0011198 A1, Jan. 12, 2023
Int. Cl. C23C 14/22 (2006.01); C23C 14/04 (2006.01); C23C 14/12 (2006.01); C23C 14/24 (2006.01)
CPC C23C 14/24 (2013.01) [C23C 14/04 (2013.01); C23C 14/12 (2013.01); C23C 14/228 (2013.01)] 13 Claims
OG exemplary drawing
 
1. A system comprising:
at least one carrier gas source;
at least one heated container that includes organic material;
a jet array print head that includes a plurality of jetting apertures to print lines on a substrate, and that is connected to a vacuum source, wherein the jet array print head includes a gas manifold with an embedded heater that is coupled to a heated injection block;
a plurality of gas lines that are communicatively coupled the at least one carrier gas source, the at least one heated container, and the jet array print head, wherein the carrier gas transmits the organic material through the gas lines to the jet array print head that contains the plurality of jetting apertures; and
a pair of gas bearing plates, including a top gas bearing plate and a bottom gas bearing plate, each having a plurality of pressure apertures and a plurality of vacuum apertures, wherein the top gas bearing plate applies a uniform force to a top surface of the substrate and the bottom gas bearing plate applies a uniform force to a bottom surface of the substrate, wherein the top gas bearing plate includes a slot configured for the print head to fit within, and wherein the plurality of vacuum apertures of the pair of gas bearing plates are arranged perpendicular to a direction of travel of the substrate.