US 12,442,068 B2
OVJP deposition nozzle with delivery flow retarders
Gregory McGraw, Yardley, PA (US); William E. Quinn, Whitehouse Station, NJ (US); William T. Mayweather, III, Robbinsville, NJ (US); Gregg Kottas, Ewing, NJ (US); and Xin Xu, Plainsboro, NJ (US)
Assigned to Universal Display Corporatior, Ewing, NJ (US)
Appl. No. 16/324,703
Filed by Universal Display Corporation, Ewing, NJ (US)
PCT Filed Jul. 28, 2017, PCT No. PCT/US2017/044464
§ 371(c)(1), (2) Date Feb. 11, 2019,
PCT Pub. No. WO2018/023046, PCT Pub. Date Feb. 1, 2018.
Claims priority of provisional application 62/368,603, filed on Jul. 29, 2016.
Prior Publication US 2019/0218655 A1, Jul. 18, 2019
Int. Cl. C23C 14/22 (2006.01); C23C 14/04 (2006.01); C23C 14/12 (2006.01); H10K 71/16 (2023.01); H10K 85/10 (2023.01); H10K 71/00 (2023.01)
CPC C23C 14/228 (2013.01) [C23C 14/04 (2013.01); C23C 14/12 (2013.01); H10K 71/164 (2023.02); H10K 85/141 (2023.02); H10K 71/00 (2023.02)] 21 Claims
OG exemplary drawing
 
1. An organic vapor jet printing (OVJP) deposition system comprising:
an OVJP depositor comprising a solid monolithic block of material, the OVJP depositor further comprising:
a delivery channel through the solid monolithic block of material, ending in a delivery aperture at an outer surface of the solid monolithic block of material;
a first exhaust channel through the solid monolithic block of material; and
a second exhaust channel through the solid monolithic block of material, wherein the delivery channel is disposed between the first exhaust channel and the second exhaust channel;
wherein a portion of the solid monolithic block of material extends into the delivery channel to form a solid flow retarder that does not extend around an entire inner circumference of the delivery channel;
wherein there are no delivery channels other than the delivery channel disposed between the first exhaust channel and the second exhaust channel;
an organic material source in fluid communication with the delivery channel; and
a delivery gas source in fluid communication with the organic material source and the delivery channel such that organic material provided by the organic material source is entrained in and transported by a delivery gas provided by the delivery gas source to the delivery channel.