	US 12,441,964 B2
	Cleaning agent composition and cleaning method
Hiroshi Ogino, Toyama (JP); Tetsuya Shinjo, Toyama (JP); Ryo Karasawa, Toyama (JP); and Takahisa Okuno, Toyama (JP)
Assigned to NISSAN CHEMICAL CORPORATION, Tokyo (JP)
Appl. No. 17/430,966
Filed by NISSAN CHEMICAL CORPORATION, Tokyo (JP)
PCT Filed Feb. 14, 2020, PCT No. PCT/JP2020/005809 § 371(c)(1), (2) Date Aug. 13, 2021, PCT Pub. No. WO2020/166703, PCT Pub. Date Aug. 20, 2020.
Claims priority of application No. 2019-026053 (JP), filed on Feb. 15, 2019.
Prior Publication US 2022/0010242 A1, Jan. 13, 2022
Int. Cl. C11D 7/26 (2006.01); C11D 3/18 (2006.01); C11D 3/28 (2006.01); C11D 3/30 (2006.01); C11D 7/24 (2006.01); C11D 7/32 (2006.01); C11D 7/50 (2006.01); H01L 21/02 (2006.01)

CPC C11D 7/5013 (2013.01) [C11D 3/187 (2013.01); C11D 3/28 (2013.01); C11D 3/30 (2013.01); C11D 7/247 (2013.01); C11D 7/3209 (2013.01); C11D 7/3281 (2013.01); H01L 21/02057 (2013.01); C11D 2111/22 (2024.01)]

10 Claims

1. A cleaning agent composition for use in removal of a polysiloxane adhesive remaining on a substrate, the composition comprising a tetrahydrocarbylammonium fluoride and an organic solvent, wherein the organic solvent comprises N-alkyl-2-pyrrolidone, and an aromatic compound represented by formula (1-1) or (1-2);

wherein:

each R¹⁰⁰represents a C1 to C6 alkyl group;

a total number of carbon atoms in the three C1 to C6 alkyl groups of R¹⁰⁰in formula (1-1) is 3 or greater; and a total number of carbon atoms in the two C1 to C6 alkyl groups of R¹⁰⁰in formula (1-2) is 3 or greater, and

the alkyl group of N-alkyl-2-pyrrolidone is a C1 to C6 alkyl group.