US 12,441,769 B2
Polypeptide, photoresist composition including the same, and method of forming pattern using the same
Jieun Kim, Suwon-si (KR); Soonchun Chung, Seoul (KR); Jinha Kim, Hwaseong-si (KR); and Joonsong Park, Suwon-si (KR)
Assigned to SAMSUNG ELECTRONICS CO., LTD., Gyeonggi-Do (KR)
Filed by Samsung Electronics Co., Ltd., Suwon-si (KR)
Filed on May 11, 2022, as Appl. No. 17/741,590.
Claims priority of application No. 10-2021-0176113 (KR), filed on Dec. 9, 2021.
Prior Publication US 2023/0183294 A1, Jun. 15, 2023
This patent is subject to a terminal disclaimer.
Int. Cl. C07K 14/00 (2006.01); G03F 7/039 (2006.01)
CPC C07K 14/001 (2013.01) [G03F 7/0392 (2013.01)] 17 Claims
 
1. A polypeptide consisting of a region A, a region B, a region C, and a region H, wherein the region A is disposed between the region H and the region B, wherein the region A, the region B, and the region C, are consecutively arranged, wherein
the region A has an alanine content of 20% or more and consists of a first repeat unit having 4 to 10 consecutive amino acid residues,
the region B has a tyrosine content of 10% or more and consists of a second repeat unit having 4 to 10 consecutive amino acid residues, and
the region C has a content of 50-70% or more of at least one of aspartic acid or glutamic acid, and consists of a third repeat unit having 2 to 8 consecutive amino acid residues,
the polypeptide has a weight average molecular weight of about 3,000 g/mol to about 10,000 g/mol, and
wherein
the first repeat unit is represented by Formula 1,
the second repeat unit is represented by Formula 2,
the third repeat unit repeat unit is represented by Formula 3, and
the region H is represented by Formula 4:
X11-(Ala-X12)n11-X13,  Formula 1
X21-(X22-X23)n21-Tyr,  Formula 2
X31-(X32-X33)n31-X34,  Formula 3
X41-(Ala-X42)n41-X43-Gly-Ala-Ala-Ser,  Formula 4
wherein in Formulae 1, 2, 3, and 4
X11 and X12 are each independently Gly or Ala, X13 is Ser or Ala, and n11 is an integer of 1 to 4;
X21 and X23 are each independently Gly or Ala, X22 is Gly, Ala, or Val, and n21 is an integer of 1 to 4;
X31 to X34 are each independently Asp or Glu, and n31 is an integer of 0 to 3; and
X41 and X42 are each independently Gly or Ala, X43 is Ser or Ala, and n41 is 1 or 2.