US 12,441,747 B2
Silicon compounds and methods for depositing films using same
Manchao Xiao, San Diego, CA (US); Raymond N. Vrtis, Carefree, AZ (US); Robert Gordon Ridgeway, Chandler, AZ (US); William R. Entley, Gilbert, AZ (US); Jennifer Lynn Anne Achtyl, Chandler, AZ (US); Xinjian Lei, Vista, CA (US); and Daniel P. Spence, Carlsbad, CA (US)
Assigned to Versum Materials US, LLC, Tempe, AZ (US)
Filed by Versum Materials US, LLC, Tempe, AZ (US)
Filed on Dec. 9, 2022, as Appl. No. 18/064,115.
Application 18/064,115 is a division of application No. 16/657,105, filed on Oct. 18, 2019, abandoned.
Application 18/064,115 is a division of application No. PCT/US2019/045877, filed on Aug. 9, 2019.
Application 16/657,105 is a continuation of application No. 16/532,657, filed on Aug. 6, 2019, abandoned.
Claims priority of provisional application 62/717,454, filed on Aug. 10, 2018.
Prior Publication US 2023/0123377 A1, Apr. 20, 2023
Int. Cl. C07F 7/18 (2006.01); C07F 7/00 (2006.01); C23C 16/30 (2006.01); C23C 16/50 (2006.01)
CPC C07F 7/1804 (2013.01) [C07F 7/00 (2013.01); C07F 7/1892 (2013.01); C23C 16/30 (2013.01); C23C 16/50 (2013.01)] 2 Claims
 
1. A method for making a silicon compound represented by Formula I:

OG Complex Work Unit Chemistry
the method comprising:
performing hydrosilylation of an alkoxysilane with an unsaturated alcohol in presence of a catalyst, followed by cyclization with or without solvent according to equation (1) or (2):

OG Complex Work Unit Chemistry

OG Complex Work Unit Chemistry
wherein R1 is selected from the group consisting of hydrogen, a linear C1 to C10 alkyl group, a branched C3 to C10 alkyl group, a linear C2 to C10 alkenyl group, a branched C3 to C10 alkenyl group, a linear C2 to C10 alkynyl group, a branched C4 to C10 alkynyl group, a C3 to C10 cyclic alkyl group, a C3 to C10 hetero-cyclic alkyl group, a C5 to C10 aryl group, and a C3 to C10 hetero-aryl group; R2 is a C3 to C4 alkyl di-radical which forms a five-membered, or six-membered saturated cyclic ring with the Si and oxygen atoms with C1 to C6 alkyl substituents; R3 is selected from the group consisting of a linear C1 to C10 alkyl group, a branched C3 to C10 alkyl group, a linear C2 to C10 alkenyl group, a branched C3 to C10 alkenyl group, a linear C2 to C10 alkynyl group, a branched C4 to C10 alkynyl group, a C3 to C10 cyclic alkyl group, a C3 to C10 hetero-cyclic alkyl group, a C5 to Co aryl group, and a C3 to C10 hetero-aryl group, and alkoxy OR4 wherein R4 is selected from the group consisting of a linear C1 to C10 alkyl group, a branched C3 to C10 alkyl group, a linear C2 to C10 alkenyl group, a branched C3 to C10 alkenyl group, a linear C2 to C10 alkynyl group and a branched C4 to C10 alkynyl group; and R5-8 are independently selected from the group consisting of hydrogen, a linear C1 to C10 alkyl group and a branched C3 to C10 alkyl group with the proviso that either all of R5-8 are hydrogen, or at least one of R7-8 is not hydrogen.