US 12,441,607 B2
Micromechanical component and method for producing same
Roman Forke, Chemnitz (DE); and Karla Hiller, Chemnitz (DE)
Assigned to Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e. V., Munich (DE)
Appl. No. 17/256,565
Filed by Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V., Munich (DE); and Technische Universität Chemnitz, Chemnitz (DE)
PCT Filed Jun. 27, 2019, PCT No. PCT/EP2019/067248
§ 371(c)(1), (2) Date Dec. 28, 2020,
PCT Pub. No. WO2020/002554, PCT Pub. Date Jan. 2, 2020.
Claims priority of application No. 10 2018 210 810.2 (DE), filed on Jun. 29, 2018.
Prior Publication US 2021/0147223 A1, May 20, 2021
Int. Cl. B81C 1/00 (2006.01); B81B 3/00 (2006.01); G01P 15/125 (2006.01)
CPC B81C 1/00619 (2013.01) [B81B 3/0027 (2013.01); G01P 15/125 (2013.01); B81B 2201/0235 (2013.01); B81B 2203/0163 (2013.01)] 26 Claims
OG exemplary drawing
 
1. A component for a micromechanical system having an upper side and a lower side opposite the upper side, the component comprising:
several first structural elements that are arranged in a first region of the component and are bounded by at least one first gap;
at least one second structural element that is arranged in a second region of the component different from the first region and is bounded by at least one second gap;
wherein the first region is defined by a first cutout in the lower side of the component and a first thickness of the component in the first region is reduced with respect to a second thickness of the component in the second region;
wherein the at least one first gap extends in the first region from the upper side to the lower side and ends in the first cutout and has a first gap depth defined by the first thickness of the component in the first region;
wherein the at least one second gap extends in the second region from the upper side to the lower side and ends outside the first cutout and has a second gap depth defined by the second thickness of the component in the second region, the second gap depth larger than the first gap depth of the first gap; and
wherein a minimal second gap width of the at least one second gap is larger than a minimal first gap width of the at least one first gap; and
further comprising a frame, a mass arrangement vibratory with respect to the frame, and an anchor structure fixedly arranged or fixedly arrangeable relative to the frame, wherein the at least one first gap extends between the mass arrangement and the frame or between the mass arrangement and the anchor structure such that the several first structural elements bounded by the at least one first gap comprises first electrodes, the first electrodes comprising fixed electrode elements connected to the anchor structure or to the frame, and the first electrodes comprising movable electrode elements connected to the mass arrangement, wherein the fixed electrode elements connected to the anchor structure or to the frame and the movable electrode elements connected to the mass arrangement engage into one another and are movable relative to one another.