| CPC B41J 2/14233 (2013.01) | 20 Claims |
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1. A liquid ejecting head comprising:
a piezoelectric element including a first electrode, a piezoelectric body layer, and a second electrode stacked in a first direction;
a vibration plate vibrated by driving of the piezoelectric element; and
a pressure chamber substrate that defines a pressure chamber where pressure is applied to a liquid by vibration of the vibration plate, wherein
the pressure chamber substrate, the vibration plate, and the piezoelectric element are stacked in this order in the first direction,
the vibration plate includes
a first layer containing silicon as a constituent element,
a second layer disposed between the first layer and the piezoelectric body layer and containing a metal element other than zirconium as a constituent element, and
a third layer disposed between the second layer and the piezoelectric body layer and containing zirconium as a constituent element, and
when a portion of the piezoelectric element where the piezoelectric body layer is sandwiched by the first electrode and the second electrode in the first direction is an activation portion,
when a region of the vibration plate that overlaps with the pressure chamber and the activation portion when seen in the first direction is an active region, and
when a region of the vibration plate that overlaps with the pressure chamber and does not overlap with the activation portion when seen in the first direction is an inactive region,
the vibration plate has the first layer, the second layer, and the third layer in the active region, and has the first layer and the second layer and does not have the third layer in at least part of the inactive region, and
in at least part of the inactive region, the second layer of the vibration plate is stacked adjacent to one of the first electrode and the second electrode.
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