US 12,441,106 B2
Apparatuses for supplying chemical liquid
Jangmi Woo, Cheonan-si (KR); Kihoon Choi, Hwaseong-si (KR); Younghoon Jeong, Cheonan-si (KR); and Myungjin Kim, Cheonan-si (KR)
Assigned to Semes Co., Ltd., Cheonan-si (KR)
Filed by Semes Co., Ltd., Cheonan-si (KR)
Filed on Jul. 28, 2022, as Appl. No. 17/815,617.
Claims priority of application No. 10-2021-0103985 (KR), filed on Aug. 6, 2021.
Prior Publication US 2023/0037419 A1, Feb. 9, 2023
Int. Cl. B41J 2/11 (2006.01); B41J 2/045 (2006.01); B41J 2/14 (2006.01); B41J 2/175 (2006.01)
CPC B41J 2/11 (2013.01) [B41J 2/04583 (2013.01); B41J 2/14451 (2013.01); B41J 2/17596 (2013.01)] 16 Claims
OG exemplary drawing
 
1. An apparatus for supplying chemical liquid, comprising:
at least two ink jet heads arranged in parallel;
a reservoir for receiving a chemical liquid provided onto a substrate from each of the at least two ink jet heads;
a chemical liquid supplying member for providing the chemical liquid to each of the at least two ink jet heads, wherein the chemical liquid supplying member includes a supply line;
a chemical liquid collecting member for drawing and collecting a chemical liquid remaining in each of the at least two ink jet heads, wherein the chemical liquid collecting member includes a recovery line,
wherein one path of the chemical liquid from the chemical liquid supplying member to the chemical liquid collecting member via one of the at least two ink jet heads is the same as a length of another path of the chemical liquid from the chemical liquid supplying member to the chemical liquid collecting member via the other of the at least two ink jet heads; and
an absorbing member including a first portion connected to the supply line of the chemical liquid supplying member for applying an absorption force to the chemical liquid supplying member so as to provide the chemical liquid from the reservoir into the at least two inkjet heads and including a second portion connected to the recovery line of the chemical collecting member for applying the absorption force to the chemical liquid collecting member so as to recover the remaining chemical liquid from the at least two inkjet heads into the reservoir.