US 12,440,971 B2
Apparatus for transporting substrate, system for processing substrate, and method of transporting substrate
Takehiro Shindo, Yamanashi (JP); Akira Takahashi, Iwate (JP); Takashi Horiuchi, Yamanashi (JP); and Toshiaki Kodama, Yamanashi (JP)
Assigned to Tokyo Electron Limited, Tokyo (JP)
Filed by TOKYO ELECTRON LIMITED, Tokyo (JP)
Filed on Dec. 17, 2021, as Appl. No. 17/554,343.
Claims priority of application No. 2020-210561 (JP), filed on Dec. 18, 2020.
Prior Publication US 2022/0193897 A1, Jun. 23, 2022
Int. Cl. B25J 9/16 (2006.01); B25J 11/00 (2006.01); B25J 13/08 (2006.01); B25J 15/00 (2006.01); B25J 17/02 (2006.01); B25J 19/00 (2006.01); H01L 21/687 (2006.01)
CPC B25J 9/1628 (2013.01) [B25J 11/0095 (2013.01); B25J 13/088 (2013.01); B25J 15/0014 (2013.01); B25J 17/0275 (2013.01); H01L 21/68707 (2013.01); B25J 19/0083 (2013.01)] 18 Claims
OG exemplary drawing
 
1. An apparatus for transporting a substrate, comprising:
an end effector including a fork which holds the substrate and a wrist part which holds a proximal end portion of the fork;
an arm provided with the end effector installed thereon and a mechanism which moves the fork; and
an inclination adjusting mechanism provided between the fork and the wrist part or between the wrist part and the arm to adjust an inclination of the fork,
wherein the inclination adjusting mechanism includes:
three support pins provided to support the fork or the wrist part from a lower surface side and disposed at positions at which vertices of a triangle are formed when seen in a plan view,
a height adjusting part which changes height positions of upper ends of the three support pins relative to each other, and
a pulling pin disposed inside the triangle to maintain a state in which the upper end of each of the support pins and the lower surface of the fork or the wrist part are in contact with each other, and installed to pull the fork toward a support pin side.