US 12,440,667 B2
Method for manufacturing an electrode
Denys Nikolayev, Lviv (UA); Wout Joseph, Vichte (BE); Luc Martens, De Pinte (BE); Alexandru Andrei, Wolluwe Saint Pierre (BE); Carolina Mora Lopez, Kessel-Lo (BE); and Emmeric Tanghe, Ghent (BE)
Assigned to IMEC VZW, Leuven (BE); and Universiteit Gent, Ghent (BE)
Filed by IMEC VZW, Leuven (BE); and Universiteit Gent, Ghent (BE)
Filed on Dec. 19, 2022, as Appl. No. 18/068,045.
Claims priority of application No. 21217497 (EP), filed on Dec. 23, 2021.
Prior Publication US 2023/0201573 A1, Jun. 29, 2023
Int. Cl. A61N 1/05 (2006.01); H01B 5/14 (2006.01); H01B 13/00 (2006.01)
CPC A61N 1/0529 (2013.01) [H01B 5/14 (2013.01); H01B 13/0036 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A method for manufacturing an electrode, the method comprising:
providing, over a top surface of a substrate, a first electrically conductive element formed from one or more electrically conductive materials;
measuring at least one parameter indicative of a shape or of dimensions of the first electrically conductive element;
performing simulations of the first electrically conductive element and a dielectric wall surrounding the first electrically conductive element, wherein:
the dielectric wall for each simulation has a respective wall height from among a plurality of wall heights, and
each simulation is based on:
the respective wall height from among the plurality of wall heights,
the first electrically conductive element formed from one or more electrically conductive materials, and
the at least one parameter;
for each simulation and the respective wall height, computing a maximum current density present at a surface of the simulated first electrically conductive element;
determining, based on the maximum current densities, one or more wall heights for which the maximum current density is below a predefined threshold; and
providing a second electrically conductive element, identical to the first electrically conductive element, surrounded by a corresponding wall having a corresponding wall height of the one or more wall heights.