CPC H10N 70/231 (2023.02) [G11C 13/0004 (2013.01); G11C 13/0069 (2013.01); H10N 70/8413 (2023.02); H10N 70/8828 (2023.02); G11C 2013/008 (2013.01)] | 18 Claims |
1. A phase-change memory cell, comprising:
a heater;
a stack including:
a layer including germanium; and
a first alloy including germanium, antimony, and tellurium;
a second alloy including germanium, antimony, and tellurium, the second alloy having a higher germanium concentration than the first alloy;
a resistive layer between the heater and the stack, the second alloy extending from the resistive layer and through the layer;
a conductive layer in contact with a top surface of the stack; and
an insulating region laterally surrounding and in contact with sidewalls of the stack and sidewalls of a lower portion of the conductive layer, an upper portion of the conductive layer being positioned on top of the insulating region.
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