US 12,114,402 B2
Holding device and method of manufacturing holding device
Ryunosuke Sakamaki, Nagoya (JP); Katsuya Takaoka, Nagoya (JP); and Hiroshi Watanabe, Nagoya (JP)
Assigned to NITERRA CO., LTD., Nagoya (JP)
Appl. No. 16/975,607
Filed by NGK SPARK PLUG CO., LTD., Nagoya (JP)
PCT Filed Nov. 13, 2019, PCT No. PCT/JP2019/044466
§ 371(c)(1), (2) Date Aug. 25, 2020,
PCT Pub. No. WO2020/105521, PCT Pub. Date May 28, 2020.
Claims priority of application No. 2018-216115 (JP), filed on Nov. 19, 2018; and application No. 2018-216116 (JP), filed on Nov. 19, 2018.
Prior Publication US 2020/0404747 A1, Dec. 24, 2020
This patent is subject to a terminal disclaimer.
Int. Cl. H05B 3/06 (2006.01); C04B 35/581 (2006.01); H01L 21/683 (2006.01); H05B 3/03 (2006.01); H05B 3/12 (2006.01); H05B 3/20 (2006.01); H05B 3/28 (2006.01); H05B 3/74 (2006.01)
CPC H05B 3/12 (2013.01) [C04B 35/581 (2013.01); H05B 3/03 (2013.01); H05B 3/06 (2013.01); H05B 3/20 (2013.01); H05B 3/283 (2013.01); H05B 3/74 (2013.01); H01L 21/683 (2013.01); H05B 2203/016 (2013.01)] 8 Claims
OG exemplary drawing
 
1. A holding device comprising:
a ceramic member having a first surface approximately perpendicular to a first direction and formed of a sintered ceramic material containing aluminum nitride as a main component;
a heating resistor element formed of a metal and disposed in the ceramic member;
an electricity supply connection member which is electrically conductive and is in contact with the heating resistor element; and
an electricity supply terminal which is electrically conductive and is electrically connected to the electricity supply connection member,
the holding device being adapted to hold an object on the first surface of the ceramic member and being characterized in that
at least a portion of a surface of the heating resistor element, excluding its contact surface for contact with the electricity supply connection member, is covered with a coat layer formed of a nitride selected from the group consisting of AlN, AlTiN, AlTiSiN, AlZrN, AlTiCrN, VN, and NbN.