US 12,113,512 B2
Layout of XBARs with multiple sub-resonators in parallel
Andrew Guyette, San Mateo, CA (US)
Assigned to MURATA MANUFACTURING CO., LTD., Nagaokakyo (JP)
Filed by Murata Manufacturing Co., Ltd., Nagaokakyo (JP)
Filed on Aug. 20, 2021, as Appl. No. 17/408,264.
Claims priority of provisional application 63/167,510, filed on Mar. 29, 2021.
Prior Publication US 2022/0311416 A1, Sep. 29, 2022
Int. Cl. H03H 9/56 (2006.01); H03H 3/02 (2006.01); H03H 9/02 (2006.01); H03H 9/205 (2006.01)
CPC H03H 9/568 (2013.01) [H03H 3/02 (2013.01); H03H 9/02228 (2013.01); H03H 9/205 (2013.01)] 20 Claims
OG exemplary drawing
 
1. An acoustic filter device comprising:
a first port configured as an input of the acoustic filter device;
a second port configured as an output of the acoustic filter device;
a transversely-excited film bulk acoustic resonator (XBAR) comprising a plurality of sub-resonators; and
a first interconnector and a second interconnector connecting the plurality of sub-resonators in parallel between the first port and the second port,
wherein a first electrical path goes from the first port through the first interconnect, a first sub-resonator of the plurality of sub-resonators, and the second interconnect, to the second port,
wherein a second electrical path goes from the first port through the first interconnect, a second sub-resonator of the plurality of sub-resonators, and the second interconnect, to the second port,
wherein the first and second interconnectors are physically configured such that an electrical length from the first port to the second port is effectively a same electrical length for the first electrical path and the second electrical path.