US 12,113,326 B2
Laser device and electronic device manufacturing method
Yoichi Sasaki, Oyama (JP); Kouji Kakizaki, Oyama (JP); and Hakaru Mizoguchi, Oyama (JP)
Assigned to Gigaphoton Inc., Tochigi (JP)
Filed by Gigaphoton Inc., Tochigi (JP)
Filed on Aug. 5, 2022, as Appl. No. 17/817,839.
Application 17/817,839 is a continuation of application No. PCT/JP2020/012174, filed on Mar. 19, 2020.
Prior Publication US 2022/0376455 A1, Nov. 24, 2022
Int. Cl. H01S 3/036 (2006.01); G03F 7/20 (2006.01); H01S 3/038 (2006.01)
CPC H01S 3/036 (2013.01) [G03F 7/2006 (2013.01); H01S 3/038 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A laser device, comprising:
a chamber into which laser gas is introduced;
a pair of electrodes arranged in the chamber;
a power source configured to apply a voltage between the electrodes;
a nozzle structure which includes an internal passage for receiving the laser gas and a slit connected to the internal passage and is configured to generate flow of the laser gas between the electrodes due to the laser gas blowing out from the slit;
a gas flow path which has a suction port through which the laser gas in the chamber is suctioned and introduces, to the nozzle structure, the laser gas suctioned through the suction port; and
a blower device configured to cause the laser gas to blow toward the internal passage of the nozzle structure through the gas flow path.