US 12,113,202 B2
Pre-lithiation process for electrode by dry direct contact to lithium targets
Dmitri A. Brevnov, San Jose, CA (US)
Assigned to APPLIED MATERIALS, INC., Santa Clara, CA (US)
Filed by Applied Materials, Inc., Santa Clara, CA (US)
Filed on Nov. 15, 2022, as Appl. No. 17/987,686.
Application 17/987,686 is a division of application No. 16/439,971, filed on Jun. 13, 2019, granted, now 11,532,808.
Claims priority of provisional application 62/688,352, filed on Jun. 21, 2018.
Prior Publication US 2023/0072774 A1, Mar. 9, 2023
Int. Cl. H01M 4/139 (2010.01); H01M 4/04 (2006.01); H01M 4/38 (2006.01); H01M 4/40 (2006.01); H01M 10/0525 (2010.01)
CPC H01M 4/139 (2013.01) [H01M 4/043 (2013.01); H01M 4/0471 (2013.01); H01M 4/382 (2013.01); H01M 4/405 (2013.01); H01M 10/0525 (2013.01)] 20 Claims
OG exemplary drawing
 
1. An integrated processing system operable to form a pre-lithiated electrode, comprising:
a reel-to-reel system operable to transport a continuous sheet of material through one or more processing chambers; and
a pre-lithiation module defining a processing region and adapted to process the continuous sheet of material, comprising:
a lithium metal target operable to contact and supply lithium to the continuous sheet of material;
a press coupled with the lithium metal target and operable to move the lithium metal target into contact with the continuous sheet of material;
an ultrasonic transducer positioned in the processing region and operable to apply ultrasonic energy to the lithium metal target; and
a heat source positioned in the processing region and operable to heat the lithium metal target.