CPC H01L 29/78391 (2014.09) [H01L 29/516 (2013.01); H10B 51/30 (2023.02)] | 20 Claims |
1. A semiconductor device comprising:
a semiconductor layer extending in a first direction and comprising a source region and a drain region, which are apart from each other in the first direction;
an insulating layer surrounding the semiconductor layer;
a first gate electrode layer surrounding the insulating layer;
a ferroelectric layer on the first gate electrode layer; and
a second gate electrode layer on the ferroelectric layer,
wherein between the source region and the drain region, a ratio C2/C1 of a second capacitance C2 between the first gate electrode layer and the second gate electrode layer to a first capacitance C1 between the semiconductor layer and the first gate electrode layer is about 1/20 to about ⅕.
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