CPC H01L 27/1461 (2013.01) [H01L 27/14603 (2013.01); H01L 27/14643 (2013.01); H04N 25/75 (2023.01)] | 18 Claims |
1. A photodetector, comprising:
a semiconductor substrate that has a first main surface and a second main surface opposed to the first main surface;
an epitaxial layer in the semiconductor substrate;
a first semiconductor layer that is of a first conductivity type, and included in the semiconductor substrate and closer to the first main surface than to the second main surface;
a multiplication region included in the epitaxial layer, and causes avalanche multiplication to a charge generated in the semiconductor substrate through photoelectric conversion, the multiplication region comprising at least two multiplication regions; and
an isolation region that separates the at least two multiplication regions,
wherein a gradient of an impurity concentration distribution of the epitaxial layer includes a first section where an impurity concentration of the epitaxial layer is substantially constant and a second section where the impurity concentration drastically increases from the first main surface toward the second main surface, the second section following the first section.
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