US 12,113,078 B2
Photodetector
Akito Inoue, Osaka (JP); Yuki Sugiura, Osaka (JP); and Yutaka Hirose, Kyoto (JP)
Assigned to PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO., LTD., Osaka (JP)
Filed by Panasonic Intellectual Property Management Co., Ltd., Osaka (JP)
Filed on Sep. 20, 2021, as Appl. No. 17/479,835.
Application 17/479,835 is a continuation of application No. 17/039,128, filed on Sep. 30, 2020, granted, now 11,888,003.
Application 17/039,128 is a continuation of application No. PCT/JP2019/013885, filed on Mar. 28, 2019.
Claims priority of application No. 2018-067892 (JP), filed on Mar. 30, 2018.
Prior Publication US 2022/0005848 A1, Jan. 6, 2022
Int. Cl. H01L 27/146 (2006.01); H04N 25/75 (2023.01)
CPC H01L 27/1461 (2013.01) [H01L 27/14603 (2013.01); H01L 27/14643 (2013.01); H04N 25/75 (2023.01)] 18 Claims
OG exemplary drawing
 
1. A photodetector, comprising:
a semiconductor substrate that has a first main surface and a second main surface opposed to the first main surface;
an epitaxial layer in the semiconductor substrate;
a first semiconductor layer that is of a first conductivity type, and included in the semiconductor substrate and closer to the first main surface than to the second main surface;
a multiplication region included in the epitaxial layer, and causes avalanche multiplication to a charge generated in the semiconductor substrate through photoelectric conversion, the multiplication region comprising at least two multiplication regions; and
an isolation region that separates the at least two multiplication regions,
wherein a gradient of an impurity concentration distribution of the epitaxial layer includes a first section where an impurity concentration of the epitaxial layer is substantially constant and a second section where the impurity concentration drastically increases from the first main surface toward the second main surface, the second section following the first section.