US 12,112,982 B2
Nanoscale resolution, spatially-controlled conductivity modulation of dielectric materials using a focused ion beam
Hooman Mohseni, Wilmette, IL (US); and Simone Bianconi, Evanston, IL (US)
Assigned to Northwestern University, Evanston, IL (US)
Appl. No. 17/293,276
Filed by Northwestern University, Evanston, IL (US)
PCT Filed Nov. 7, 2019, PCT No. PCT/US2019/060183
§ 371(c)(1), (2) Date May 12, 2021,
PCT Pub. No. WO2020/159596, PCT Pub. Date Aug. 6, 2020.
Claims priority of provisional application 62/760,993, filed on Nov. 14, 2018.
Prior Publication US 2022/0020635 A1, Jan. 20, 2022
Int. Cl. H01L 21/768 (2006.01); H01L 21/42 (2006.01)
CPC H01L 21/76823 (2013.01) [H01L 21/42 (2013.01); H01L 21/76825 (2013.01); H01L 21/76843 (2013.01)] 12 Claims
OG exemplary drawing
 
1. A method comprising:
(a) irradiating a region of a dielectric material having a resistivity of at least 108 Ω cm with a focused ion beam, the irradiated region corresponding to a conductive feature embedded in the dielectric material, the conductive feature having a conductivity greater than that of the dielectric material; and
(b) forming one or more contact pads of a conductive material in electrical communication with the conductive feature, the one or more contact pads configured to apply a voltage across the conductive feature using a voltage source, the method further comprising heating the conductive feature under an oxidizing atmosphere for a period of time so as to erase the conductive feature.