CPC H01J 49/065 (2013.01) [G01N 27/622 (2013.01); H01J 49/022 (2013.01); H01J 49/025 (2013.01)] | 20 Claims |
1. An ion guide and/or trap comprising:
a plurality of electrodes;
a detector configured to detect light or particles emitted from the ion guide and/or ion trap due to electrical breakdown; and
a control circuit configured to control the ion guide and/or ion trap in response to the detector detecting light or particles emitted from the ion guide and/or ion trap.
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