US 12,112,931 B2
Dual reverse pulse sputtering system
Doug Pelleymounter, Northfield, MN (US)
Assigned to Advanced Energy Industries, Inc., Denver, CO (US)
Filed by Advanced Energy Industries, Inc., Fort Collins, CO (US)
Filed on May 31, 2021, as Appl. No. 17/335,011.
Application 17/335,011 is a continuation of application No. 15/844,438, filed on Dec. 15, 2017.
Application 15/844,438 is a continuation in part of application No. 15/802,791, filed on Nov. 3, 2017, granted, now 10,910,203, issued on Feb. 2, 2021.
Application 15/802,791 is a continuation of application No. 14/697,267, filed on Apr. 27, 2015, granted, now 9,812,305, issued on Nov. 7, 2017.
Prior Publication US 2021/0287888 A1, Sep. 16, 2021
This patent is subject to a terminal disclaimer.
Int. Cl. H01J 37/34 (2006.01); C23C 14/34 (2006.01); C23C 14/35 (2006.01); C23C 14/56 (2006.01); C23C 14/08 (2006.01)
CPC H01J 37/3476 (2013.01) [C23C 14/3485 (2013.01); C23C 14/35 (2013.01); C23C 14/352 (2013.01); C23C 14/562 (2013.01); H01J 37/3405 (2013.01); H01J 37/3438 (2013.01); H01J 37/3444 (2013.01); H01J 37/3467 (2013.01); C23C 14/083 (2013.01); H01J 2237/2485 (2013.01); H01J 2237/327 (2013.01); H01J 2237/332 (2013.01)] 13 Claims
OG exemplary drawing
 
1. A pulsed power system, comprising:
a first power source coupled to a first power lead and a second power lead, the first power source configured to apply a first voltage at the first power lead that alternates between positive and negative relative to the second power lead during each of multiple cycles;
a second power source coupled to a third power lead and the second power lead, the second power source configured to apply a second voltage to the third power lead that alternates between positive and negative relative to the second power lead during each of the multiple cycles; and
a controller configured to control the first power source and the second power source to phase-synchronize the first voltage with the second voltage, so both, the first voltage and the second voltage, are simultaneously negative during a portion of each cycle and simultaneously positive relative to the second power lead during another portion of each cycle, wherein the first voltage at the first power lead and the second voltage at the third power lead are simultaneously negative relative to the second power lead at least 70 percent of a time over the multiple cycles.