US 12,112,916 B2
Methods and systems for sample transfer
Krishna Kanth Neelisetty, Brno (CZ); Milos Trenz, Brno (CZ); Jindrich Vondruska, Brno (CZ); and Jakub Stetina, Brno (CZ)
Assigned to FEI Company, Hillsboro, OR (US)
Filed by FEI Company, Hillsboro, OR (US)
Filed on Jan. 25, 2022, as Appl. No. 17/584,303.
Claims priority of provisional application 63/273,764, filed on Oct. 29, 2021.
Prior Publication US 2023/0132874 A1, May 4, 2023
Int. Cl. H01J 37/18 (2006.01)
CPC H01J 37/185 (2013.01) 18 Claims
OG exemplary drawing
 
1. A sample transfer system for transferring a sample carrier into or out of a vacuum chamber, comprising:
a transfer shuttle including a shuttle chamber for receiving the sample carrier; and
a transfer rod detachably coupled to the transfer shuttle, wherein the sample carrier is transferrable into or out of the shuttle chamber by operating the transfer rod, wherein the transfer rod includes a transfer post and a shell extending along a longitudinal axis of the transfer rod, and operating the transfer rod includes sliding the transfer post relative to the shell.