US 12,112,915 B2
Vaporizer, ion source and method for generating aluminum-containing vapor
Sami K. Hahto, Nashua, NH (US); and George Sacco, Groveland, MA (US)
Assigned to NISSIN ION EQUIPMENT CO., LTD., Koka (JP)
Filed by NISSIN ION EQUIPMENT CO., LTD., Koka (JP)
Filed on Apr. 6, 2022, as Appl. No. 17/714,491.
Prior Publication US 2023/0326702 A1, Oct. 12, 2023
Int. Cl. H01J 37/08 (2006.01); C23C 14/48 (2006.01); H01J 37/317 (2006.01)
CPC H01J 37/08 (2013.01) [C23C 14/48 (2013.01); H01J 37/3171 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A vaporizer comprising:
a crucible in which an aluminum-containing solid material is placed, the crucible comprising a chlorine containing gas inlet and a vapor outlet; and
a heater configured to heat the crucible.