US 12,112,890 B2
Top magnets for decreased non-uniformity in PVD
Borui Xia, San Jose, CA (US); Anthony Chih-Tung Chan, Sunnyvale, CA (US); Shiyu Yue, Sunnyvale, CA (US); Wei Lei, Campbell, CA (US); Aravind Miyar Kamath, San Jose, CA (US); Mukund Sundararajan, Bangalore (IN); Rongjun Wang, Dublin, CA (US); and Adolph Miller Allen, Oakland, CA (US)
Assigned to Applied Materials, Inc., Santa Clara, CA (US)
Filed by Applied Materials, Inc., Santa Clara, CA (US)
Filed on Sep. 17, 2021, as Appl. No. 17/478,047.
Prior Publication US 2023/0088552 A1, Mar. 23, 2023
Int. Cl. C23C 14/35 (2006.01); H01F 7/18 (2006.01)
CPC H01F 7/18 (2013.01) [C23C 14/358 (2013.01)] 19 Claims
OG exemplary drawing
 
1. A magnet assembly comprising:
one or more magnets; and
a housing having a bottom ring with a top surface and a bottom surface defining a thickness of the bottom ring, an inner diameter with an inner peripheral face and an outer diameter with an outer peripheral face, the bottom ring having a plurality of openings extending through the thickness of the bottom ring, and a housing annular wall extending a height from the top surface of the bottom ring, the housing annular wall having an inner diameter with an inner peripheral face and an outer diameter with an outer peripheral face defining a wall thickness, and a top flange on a top of the housing annular wall, the top flange extending outwardly from the outer peripheral face of the housing annular wall.