CPC H01B 5/14 (2013.01) [C23C 14/24 (2013.01); H01B 5/16 (2013.01); H01L 27/1218 (2013.01); H01L 27/1244 (2013.01); H01L 27/14678 (2013.01); H01L 29/41733 (2013.01); H01L 29/42384 (2013.01); H01L 29/78603 (2013.01)] | 25 Claims |
1. A stacked structure for a stretchable device, the stacked structure comprising:
a stretchable layer, the stretchable layer including an elastic polymer; and
a conductive layer on the stretchable layer, the conductive layer including a metal,
wherein the stretchable layer includes a first depth region and a second depth region sequentially disposed in a depth direction from a surface of the stretchable layer that is in contact with the conductive layer,
wherein metal atoms of the metal are penetrated or diffused into the elastic polymer in the first depth region such that the first depth region includes the metal, and
the metal in the first depth region is in a form of metal clusters.
|