US 12,112,006 B2
Input sensing panel, display device having the same, and method of manufacturing the display device
Jin-Su Byun, Seoul (KR); and Woongsik Kim, Hwaseong-si (KR)
Assigned to Samsung Display Co., Ltd., Yongin-si (KR)
Filed by Samsung Display Co., Ltd.
Filed on Jul. 28, 2023, as Appl. No. 18/227,754.
Application 18/227,754 is a division of application No. 17/836,929, filed on Jun. 9, 2022, granted, now 11,747,949.
Claims priority of application No. 10-2021-0081820 (KR), filed on Jun. 23, 2021.
Prior Publication US 2023/0376154 A1, Nov. 23, 2023
Int. Cl. G06F 3/044 (2006.01); G06F 3/041 (2006.01); H10K 59/122 (2023.01); H10K 59/40 (2023.01); G09G 3/3233 (2016.01)
CPC G06F 3/0446 (2019.05) [G06F 3/0412 (2013.01); G06F 3/0443 (2019.05); H10K 59/40 (2023.02); G06F 2203/04103 (2013.01); G06F 2203/04111 (2013.01); G09G 3/3233 (2013.01); G09G 2300/0426 (2013.01); G09G 2300/0809 (2013.01); G09G 2320/0238 (2013.01); H10K 59/122 (2023.02)] 4 Claims
OG exemplary drawing
 
1. A method of manufacturing a display device, comprising:
forming a first sensing insulating layer on a display panel comprising an active area and a peripheral area;
forming a first conductive layer on the first sensing insulating layer;
forming a second sensing insulating layer to cover the first conductive layer;
forming a second conductive layer comprising a conductive material on the second sensing insulating layer;
forming a passivation layer on the second conductive layer;
substantially simultaneously etching the second conductive layer and the passivation layer through a photolithography process; and
forming a third sensing insulating layer to cover the passivation layer,
wherein the passivation layer comprises an inorganic material.