US 12,111,671 B2
Mass flow controller and flow control method therefor
Bowen Deng, Beijing (CN); Changhua Mu, Beijing (CN); and Yitao Zou, Beijing (CN)
Assigned to BEIJING SEVENSTAR FLOW CO., LTD., Beijing (CN)
Appl. No. 18/562,942
Filed by BEIJING SEVENSTAR FLOW CO., LTD., Beijing (CN)
PCT Filed May 27, 2022, PCT No. PCT/CN2022/095493
§ 371(c)(1), (2) Date Nov. 21, 2023,
PCT Pub. No. WO2022/247926, PCT Pub. Date Dec. 1, 2022.
Claims priority of application No. 202110594358.1 (CN), filed on May 28, 2021.
Prior Publication US 2024/0231398 A1, Jul. 11, 2024
Int. Cl. G05D 7/06 (2006.01); C23C 16/44 (2006.01); C23C 16/455 (2006.01); C23C 16/52 (2006.01); F16K 1/12 (2006.01); F16K 1/54 (2006.01)
CPC G05D 7/0635 (2013.01) [C23C 16/4412 (2013.01); C23C 16/45525 (2013.01); C23C 16/45546 (2013.01); C23C 16/52 (2013.01); F16K 1/12 (2013.01); F16K 1/54 (2013.01); G05D 7/06 (2013.01)] 11 Claims
OG exemplary drawing
 
1. A mass flow controller, with a fluid passage provided in the mass flow controller, and a valve connected between an inlet of the fluid passage and an outlet of the fluid passage, wherein the mass flow controller further comprises a control module, a flow sensor, and a pressure sensor, wherein
the flow sensor is disposed between the inlet and the valve, and is configured to detect a fluid flow of the fluid passage;
the pressure sensor is disposed at the outlet, and is configured to detect a fluid pressure of the fluid passage;
the control module is configured to enter a pressure feedback regulation mode in response to a variation amount of a target flow exceeding a preset threshold, and enter a flow feedback regulation mode after the fluid flow detected by the flow sensor meets a first stabilization condition, wherein
the control module is configured to, in the pressure feedback regulation mode, regulate an opening degree of the valve according to a difference between the fluid pressure detected by the pressure sensor and a target pressure corresponding to the target flow; and
the control module is configured to, in the flow feedback regulation mode, regulate the opening degree of the valve according to a difference between the fluid flow detected by the flow sensor and the target flow;
wherein the variation amount of the target flow refers to a difference between a target flow currently received by the control module and a previous target flow.